Technical support services
Plasma-Therm’s Technical Support team strives to exceed customer expectations. We
provide timely and accurate responses, and act on behalf of customers to drive continuous
improvement of products and services. The technical support team is the main channel
for resolution of customer issues, and every customer receives dedicated support to help
with troubleshooting, upgrades, and continuous improvement plans.
As part of Plasma-Therm's award-winning technical support, the following mechanisms
are in place to ensure critical system uptime and availability, and encourage the success
of our customers.
24/7 phone support
Plasma-Therm 24/7 technical support by phone ensures quick turnaround and real-time
follow-up during business hours, with after-hours support for production system troubleshooting
and urgent replacement part orders.
An escalation procedure allows internal progress tracking to ensure that every issue
is resolved in a timely manner. Our technical support software specialists are able to
remotely log in to systems to help diagnose issues and install software updates when
In the semiconductor industry, equipment issues can result in expensive delays while
the customer waits for a service engineer to arrive and repair the issue. The impact
of unexpected issues can be reduced by using a secure, remote-support communications
channel. When activated by the customer, Plasma-Therm's remote support tool makes it
possible for Plasma-Therm technical support personnel to interact with the control system,
install software updates, and check tool logs to provide immediate assistance.
Plasma-Therm’s long product lineage has formed the basis of a large library of work
instructions. The library includes detailed instructions for many service and maintenance
procedures. Work instructions can be downloaded at any time from the customer portal
The Service Advisory provides technical bulletins and addresses issues with parts
obsolescence, software upgrades, retrofit packages, and safety-related matters. It aims
to anticipate improvement requests from both technical and safety aspects.
Plasma-Therm ships the most recent system software with all systems, and includes
a full documentation package in electronic form. Hard-copy documentation is available.
All software updates include detailed release notes describing new and enhanced features
and resolved issues. The latest release notes and documentation are available through
the customer portal: info.plasmatherm.com.